The TEM silicon nitride film pane produced by Beike Nano is produced by advanced microelectronics technology and can be used for high-resolution electron microscopy observation of micro-nano samples. This pane is an octagon with a 3mm outer diameter and is suitable for all TEM sample rods. To be suitable for a variety of experimental conditions, Beike Nano provides scientific researchers with single pane, multi pane and micropore pane standard product. The silicon nitride film adopts low-stress technology (<250MPa). The silicon nitride film is thin and not easily damaged. It is very suitable for cutting-edge research in biology, materials, physics, and chemistry.
Class 100 clean environment
Strict selection of silicon substrate materials
Advanced technology level
Film stress <250Mpa
The thinnest film can reach 10nm
The window size can be up to 2cm
Roughness less than 0.5nm
Uniformity is better than 5%
Acid resistance (except hydrofluoric acid), alkali resistance, organic solvent resistance
Outer frame items | parameter | Outer frame items | parameter |
material | N -type silicon | Resistivity | 1 ~ 10 Ω-cm |
Silicon nitride film parameters | parameter | Silicon nitride film parameters | parameter |
material | LPCVD silicon nitride film | stress | <250MPa |
Dielectric constant | 6-7 | Dielectric strength | 10 (10 6 V / cm) |
Resistivity | 10 16 Ω-cm | Roughness (Ra) | 0.28 ± 5% nm |
Young‘s modulus | 270GPa | Roughness (Rms) | 0.40 ± 5% nm |
Product ID | Film thickness | Window size | Buy now |
SG010Z | 10nm | 0.10 × 0.10mm |
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SG015Z | 10nm | 0.15 × 0.15mm |
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SG025Z | 10nm | 0.25 × 0.25mm |
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SG050Z | 10nm | 0.50 × 0.50mm |
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SG025A | 15nm | 0.25x0.25mm |
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SG050A | 15nm | 0.5x0.5mm |
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SG100A | 15nm | 1x1mm |
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SG025B | 30nm | 0.25x0.25mm |
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SG050B | 30nm | 0.5x0.5mm |
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SG100B | 30nm | 1x1mm |
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SG025C | 50nm | 0.25x0.25mm |
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SG050C | 50nm | 0.5x0.5mm |
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SG100C | 50nm | 1x1mm |
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SG050D | 100nm | 0.5x0.5mm |
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SG025E | 200nm | 0.25x0.25mm |
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SG050E | 200nm | 0.5x0.5mm |
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Each box contains 10 chips |
Product ID | Film thickness | Window size | Number of windows | Window pitch |
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AR010Z | 10nm | 0.1x0.1mm | 9 | 0.35nm |
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AR010A | 15nm | 0.1x0.1mm | 9 | 0.35mm |
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AR010B | 30nm | 0.1x0.1mm | 9 | 0.35mm |
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AR010C | 50nm | 0.1x0.1mm | 9 | 0.45mm |
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TA015A | 15nm | 0.1x1.5mm | 2 | 0.45mm |
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TA015C | 50nm | 0.1x1.5mm | 2 | 0.45mm |
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Each box contains 10 chips |
Product ID | Film thickness | Window size | Aperture | Array | Hole spacing |
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ME050B | 30nm | 0.5x0.5mm | 2.8μm | 45x45 | 10μm |
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ME050C | 50nm | 0.5x0.5mm | 2.0μm | 45x45 | 10μm |
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ME050C10 | 50nm | 0.5x0.5mm | 10μm | 32x32 | 15μm |
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ME050E05 | 200nm | 0.5x0.5mm | 5μm | 49x49 | 10μm |
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Each box contains 10 chips |
Product ID | Film thickness | Window size | Aperture | Array | Hole spacing |
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NE005C10 | 50nm | 50 × 50μm | 1.0μm | 15x15 | 2.0um |
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NE050C10 | 50nm | 0.5x0.5mm | 1.0μm | 15x15x4 | 5.0μm |
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NE005E10 | 200nm | 50 × 50μm | 1.0μm | 15x15 | 2.0μm |
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NE050E10 | 200nm | 0.5x0.5mm | 1.0μm | 15x15x4 | 5.0μm |
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Each box contains 10 chips |
Warm tip: the products supplied by Beijing Beike Xincai Technology Co., Ltd. are only used for scientific research, not for human body |
Item ID | CAS | ID | Pack | Parameter | Stock | Make up | Price |
BK2020040423-01 | BK2020040423 | AR010Z | 0.1x0.1mm | 100 | $720 | ||
BK2020040423-02 | BK2020040423 | AR010A | 0.1x0.1mm | 100 | $680 | ||
BK2020040423-03 | BK2020040423 | AR010B | 0.1x0.1mm | 100 | $600 | ||
BK2020040423-04 | BK2020040423 | AR010C | 0.1x0.1mm | 100 | $520 | ||
BK2020040423-05 | BK2020040423 | TA015A | 0.1x1.5mm | 100 | $640 | ||
BK2020040423-06 | BK2020040423 | TA015C | 0.1x1.5mm | 100 | $480 |
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Reminder: Beijing Beike New Material Technology Co., Ltd. supplies products only for scientific research, not for humans |
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